Micromachined One-Port Aluminum Nitride Lamb Wave Resonators Utilizing the Lowest-Order Symmetric Mode

Published 2014 View Full Article

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Title
Micromachined One-Port Aluminum Nitride Lamb Wave Resonators Utilizing the Lowest-Order Symmetric Mode
Authors
Keywords
-
Journal
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 23, Issue 1, Pages 78-91
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2014-01-31
DOI
10.1109/jmems.2013.2290793

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