Thin film Lamb wave resonators in frequency control and sensing applications: a review

Title
Thin film Lamb wave resonators in frequency control and sensing applications: a review
Authors
Keywords
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Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 23, Issue 4, Pages 043001
Publisher
IOP Publishing
Online
2013-03-07
DOI
10.1088/0960-1317/23/4/043001

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