Gas barrier properties of SiON films deposited by plasma enhanced chemical vapor deposition at low temperature as a function of the plasma process parameters

Title
Gas barrier properties of SiON films deposited by plasma enhanced chemical vapor deposition at low temperature as a function of the plasma process parameters
Authors
Keywords
-
Journal
SURFACE & COATINGS TECHNOLOGY
Volume 228, Issue -, Pages S490-S494
Publisher
Elsevier BV
Online
2012-05-13
DOI
10.1016/j.surfcoat.2012.05.009

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