Cat-CVD SiN passivation films for OLEDs and packaging

A Roll-to-roll type catalytic chemical vapor deposition (Cat-CVD) apparatus was developed for the application to flexible organic light-emitting diode (OLED) displays and packaging. Silicon nitride (SiNx) films were prepared by this roll-to-roll type apparatus at temperatures below 60 degrees C. It was found that these SiNx films are highly moisture resistant, and the water vapor transmission rate (WVTR) on plastic substrates could be lowered to 0.01 g/m(2) day. Roll-to-roll type Cat-CVD is one of the most promising methods for the preparation of barrier films for OILED displays and packaging. (C) 2007 Elsevier B.V. All rights reserved.