Insights into the Role of Plasma in Atmospheric Pressure Chemical Vapor Deposition of Titanium Dioxide Thin Films

Title
Insights into the Role of Plasma in Atmospheric Pressure Chemical Vapor Deposition of Titanium Dioxide Thin Films
Authors
Keywords
-
Journal
Scientific Reports
Volume 8, Issue 1, Pages -
Publisher
Springer Nature America, Inc
Online
2018-11-06
DOI
10.1038/s41598-018-35154-4

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