Influence of the growth conditions on the stoichiometry and on the optical properties of titanium oxide thin films prepared by reactive sputtering

Published 2009 View Full Article

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Title
Influence of the growth conditions on the stoichiometry and on the optical properties of titanium oxide thin films prepared by reactive sputtering
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 517, Issue 18, Pages 5415-5418
Publisher
Elsevier BV
Online
2009-01-24
DOI
10.1016/j.tsf.2009.01.050

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