Multi-structural TiO2 film synthesised by an atmospheric pressure plasma-enhanced chemical vapour deposition microwave torch

Published 2016 View Full Article

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Title
Multi-structural TiO2 film synthesised by an atmospheric pressure plasma-enhanced chemical vapour deposition microwave torch
Authors
Keywords
Atmospheric Pressure, Plasma-Enhanced Chemical Vapor Deposition, Microwave Plasma Torch, Titanium Dioxide, Thin Film, Microstructure
Journal
THIN SOLID FILMS
Volume 600, Issue -, Pages 43-52
Publisher
Elsevier BV
Online
2016-01-09
DOI
10.1016/j.tsf.2016.01.011

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