Atomic Layer Deposition and Characterization of Aluminum Silicate Thin Films for Optical Applications

Published 2010 View Full Article

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Title
Atomic Layer Deposition and Characterization of Aluminum Silicate Thin Films for Optical Applications
Authors
Keywords
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Journal
JOURNAL OF THE ELECTROCHEMICAL SOCIETY
Volume 158, Issue 2, Pages P15
Publisher
The Electrochemical Society
Online
2010-12-04
DOI
10.1149/1.3519497
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