Mechanistic Study of Lithium Aluminum Oxide Atomic Layer Deposition

Published 2012 View Full Article

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Title
Mechanistic Study of Lithium Aluminum Oxide Atomic Layer Deposition
Authors
Keywords
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Journal
Journal of Physical Chemistry C
Volume 117, Issue 4, Pages 1677-1683
Publisher
American Chemical Society (ACS)
Online
2012-12-20
DOI
10.1021/jp308828p

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