Research Update: Inhomogeneous aluminium dopant distribution in magnetron sputtered ZnO:Al thin films and its influence on their electrical properties
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Title
Research Update: Inhomogeneous aluminium dopant distribution in magnetron sputtered ZnO:Al thin films and its influence on their electrical properties
Authors
Keywords
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Journal
APL Materials
Volume 3, Issue 6, Pages 060701
Publisher
AIP Publishing
Online
2015-06-10
DOI
10.1063/1.4922152
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