Achieving high free electron mobility in ZnO:Al thin films grown by reactive pulsed magnetron sputtering

Published 2009 View Full Article

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Title
Achieving high free electron mobility in ZnO:Al thin films grown by reactive pulsed magnetron sputtering
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 94, Issue 4, Pages 042103
Publisher
AIP Publishing
Online
2009-01-27
DOI
10.1063/1.3074373
References
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