Impact of Annealing on Contact Formation and Stability of IGZO TFTs

Title
Impact of Annealing on Contact Formation and Stability of IGZO TFTs
Authors
Keywords
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Journal
ECS Journal of Solid State Science and Technology
Volume 3, Issue 9, Pages Q3032-Q3034
Publisher
The Electrochemical Society
Online
2014-07-20
DOI
10.1149/2.006409jss

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