Spatially resolved TiOx phases in switched RRAM devices using soft X-ray spectromicroscopy
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Title
Spatially resolved TiOx phases in switched RRAM devices using soft X-ray spectromicroscopy
Authors
Keywords
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Journal
Scientific Reports
Volume 6, Issue 1, Pages -
Publisher
Springer Nature
Online
2016-02-19
DOI
10.1038/srep21525
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