Electrochemical and time-of-flight secondary ion mass spectrometry analysis of ultra-thin metal oxide (Al2O3 and Ta2O5) coatings deposited by atomic layer deposition on stainless steel

Published 2011 View Full Article

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Title
Electrochemical and time-of-flight secondary ion mass spectrometry analysis of ultra-thin metal oxide (Al2O3 and Ta2O5) coatings deposited by atomic layer deposition on stainless steel
Authors
Keywords
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Journal
ELECTROCHIMICA ACTA
Volume 56, Issue 28, Pages 10516-10523
Publisher
Elsevier BV
Online
2011-02-27
DOI
10.1016/j.electacta.2011.02.074

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