Investigations on phosphorous doped hydrogenated amorphous silicon carbide thin films deposited by a filtered cathodic vacuum arc technique for photo detecting applications
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Title
Investigations on phosphorous doped hydrogenated amorphous silicon carbide thin films deposited by a filtered cathodic vacuum arc technique for photo detecting applications
Authors
Keywords
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Journal
RSC Advances
Volume 4, Issue 97, Pages 54388-54397
Publisher
Royal Society of Chemistry (RSC)
Online
2014-10-16
DOI
10.1039/c4ra08343a
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