Si-rich a-SiC:H thin films: Structural and optical transformations during thermal annealing

Published 2010 View Full Article

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Title
Si-rich a-SiC:H thin films: Structural and optical transformations during thermal annealing
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 519, Issue 1, Pages 151-157
Publisher
Elsevier BV
Online
2010-07-28
DOI
10.1016/j.tsf.2010.07.085

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