Advances in the deposition chemistry of metal-containing thin films using gas phase processes

Rational Design of Functional Oxide Thin Films with Embedded Magnetic or Plasmonic Metallic Nanoparticles

(2011) Naoufal Bahlawane et al.   ANGEWANDTE CHEMIE-INTERNATIONAL EDITION

Molybdenum Atomic Layer Deposition Using MoF6and Si2H6as the Reactants

(2011) D. Seghete et al.   CHEMISTRY OF MATERIALS

Plasma-Enhanced Atomic Layer Deposition of Silver Thin Films

(2011) Maarit Kariniemi et al.   CHEMISTRY OF MATERIALS

Synthesis and Characterization of Nickel(II) Aminoalkoxides: Application to Molecular Precursors for MOCVD of Ni Thin Films

(2011) Seung Ho Yoo et al.   EUROPEAN JOURNAL OF INORGANIC CHEMISTRY

Sub-30 nm Gate Template Fabrication for Nanoimprint Lithography Using Spacer Patterning Technology

(2011) Kun-Sik Park et al.   JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY

Atomic Layer Deposition of Ruthenium Films from (Ethylcyclopentadienyl)(pyrrolyl)ruthenium and Oxygen

(2011) Kaupo Kukli et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY

Filling Narrow Trenches by Iodine-Catalyzed CVD of Copper and Manganese on Manganese Nitride Barrier/Adhesion Layers

(2011) Yeung Au et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY

Colloidal metal nanoparticles as a component of designed catalyst

(2011) Chun-Jiang Jia et al.   PHYSICAL CHEMISTRY CHEMICAL PHYSICS

Atomic Layer Deposition on Phase-Shift Lithography Generated Photoresist Patterns for 1D Nanochannel Fabrication

(2010) Firat Güder et al.   ACS Applied Materials & Interfaces

Novel Core-Shell Sn-Cu Anodes for Lithium Rechargeable Batteries Prepared by a Redox-Transmetalation Reaction

(2010) Min Gyu Kim et al.   ADVANCED MATERIALS

CVD Elaboration of Nanostructured TiO2-Ag Thin Films with Efficient Antibacterial Properties

(2010) Jitti Mungkalasiri et al.   CHEMICAL VAPOR DEPOSITION

Investigation on the Growth Initiation of Ru Thin Films by Atomic Layer Deposition

(2010) Seong Keun Kim et al.   CHEMISTRY OF MATERIALS

Investigation of AlMe3, BEt3, and ZnEt2as Co-Reagents for Low-Temperature Copper Metal ALD/Pulsed-CVD

(2010) Balamurugan Vidjayacoumar et al.   CHEMISTRY OF MATERIALS

Growth of Cu Metal Films at Room Temperature Using Catalyzed Reactions

(2010) Sang-Woo Kang et al.   CHEMISTRY OF MATERIALS

Local deposition of high-purity Pt nanostructures by combining electron beam induced deposition and atomic layer deposition

(2010) A. J. M. Mackus et al.   JOURNAL OF APPLIED PHYSICS

(MeCp)Ir(CHD) and molecular oxygen as precursors in atomic layer deposition of iridium

(2010) Jani Hämäläinen et al.   JOURNAL OF MATERIALS CHEMISTRY

Redox Transmetalation of Prickly Nickel Nanowires for Morphology Controlled Hierarchical Synthesis of Nickel/Gold Nanostructures for Enhanced Catalytic Activity and SERS Responsive Functional Material

(2010) Sougata Sarkar et al.   Journal of Physical Chemistry C

Area Selective Atomic Layer Deposition by Microcontact Printing with a Water-Soluble Polymer

(2010) Marja N. Mullings et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY

Plasma Enhanced Atomic Layer Deposition of Ruthenium Thin Films Using Isopropylmethylbenzene-Cyclohexadiene-Ruthenium and NH[sub 3] Plasma

(2010) Windu Sari et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY

Atomic Layer Deposition of Ni Thin Films and Application to Area-Selective Deposition

(2010) Woo-Hee Kim et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY

CVD of Ru, Pt and Pt-based alloy thin films using ethanol as mild reducing agent

(2010) P. Antony Premkumar et al.   MATERIALS CHEMISTRY AND PHYSICS

Formation and structural transition of molecular self-assembly on solid surface investigated by scanning tunneling microscopy

(2010) Dong Wang et al.   MATERIALS SCIENCE & ENGINEERING R-REPORTS

Liquid injection atomic layer deposition of silver nanoparticles

(2010) P R Chalker et al.   NANOTECHNOLOGY

The incorporation of preformed metal nanoparticles in zinc oxide thin films using aerosol assisted chemical vapour deposition

(2010) A. Salaün et al.   THIN SOLID FILMS

Low-Temperature Atomic Layer Deposition of Copper Metal Thin Films: Self-Limiting Surface Reaction of Copper Dimethylamino-2-propoxide with Diethylzinc

(2009) Byoung H. Lee et al.   ANGEWANDTE CHEMIE-INTERNATIONAL EDITION

Atomic Layer Deposition: An Overview

(2009) Steven M. George   CHEMICAL REVIEWS

Nickel and Nickel-Based Nanoalloy Thin Films from Alcohol-Assisted Chemical Vapor Deposition

(2009) Naoufal Bahlawane et al.   CHEMISTRY OF MATERIALS

Area-Selective ALD with Soft Lithographic Methods: Using Self-Assembled Monolayers to Direct Film Deposition

(2009) Xirong Jiang et al.   Journal of Physical Chemistry C

CVD of Conducting Ultrathin Copper Films

(2009) Naoufal Bahlawane et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY

Selective-Area Atomic Layer Deposition Using Poly(vinyl pyrrolidone) as a Passivation Layer

(2009) Elina Färm et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY

High Quality Area-Selective Atomic Layer Deposition Co Using Ammonia Gas as a Reactant

(2009) Han-Bo-Ram Lee et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY

Metal nanoparticle synthesis using supercritical alcohol

(2009) Jaehoon Kim et al.   MATERIALS LETTERS

DLI-CVD of TiO2–Cu antibacterial thin films: Growth and characterization

(2009) J. Mungkalasiri et al.   SURFACE & COATINGS TECHNOLOGY

Mass-Spectrometric Monitoring of the Thermally Induced Decomposition of Trimethylgallium, Tris(tert-Butyl)Gallium, and Triethylantimony at Low Pressure Conditions

(2008) N BAHLAWANE et al.   JOURNAL OF THE AMERICAN SOCIETY FOR MASS SPECTROMETRY

New precursors for CVD copper metallization

(2008) John A.T. Norman et al.   MICROELECTRONIC ENGINEERING

Photonic metamaterials by direct laser writing and silver chemical vapour deposition

(2008) Michael S. Rill et al.   NATURE MATERIALS

Platinum OMCVD processes and precursor chemistry

(2007) Cyril Thurier et al.   COORDINATION CHEMISTRY REVIEWS