Microstructure, Morphology and Properties of Titanium Containing Graphite-Like Carbon Films Deposited by Unbalanced Magnetron Sputtering
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Title
Microstructure, Morphology and Properties of Titanium Containing Graphite-Like Carbon Films Deposited by Unbalanced Magnetron Sputtering
Authors
Keywords
Magnetron sputtering, Graphite-like carbon, Titanium carbides, Microstructure, Properties
Journal
TRIBOLOGY LETTERS
Volume 49, Issue 1, Pages 47-59
Publisher
Springer Nature
Online
2012-09-30
DOI
10.1007/s11249-012-0041-6
References
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