The effect of applied substrate negative bias voltage on the structure and properties of Al-containing a-C:H thin films

Published 2007 View Full Article

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Title
The effect of applied substrate negative bias voltage on the structure and properties of Al-containing a-C:H thin films
Authors
Keywords
-
Journal
SURFACE & COATINGS TECHNOLOGY
Volume 202, Issue 12, Pages 2684-2689
Publisher
Elsevier BV
Online
2007-11-10
DOI
10.1016/j.surfcoat.2007.09.051

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