The effect of duty cycle on the microstructure and properties of graphite-like amorphous carbon films prepared by unbalanced magnetron sputtering

Published 2010 View Full Article

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Title
The effect of duty cycle on the microstructure and properties of graphite-like amorphous carbon films prepared by unbalanced magnetron sputtering
Authors
Keywords
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Journal
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 43, Issue 50, Pages 505401
Publisher
IOP Publishing
Online
2010-12-02
DOI
10.1088/0022-3727/43/50/505401

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