High Dielectric Constant ZrO2 Films by Atomic Layer Deposition Technique on Germanium Substrates

Title
High Dielectric Constant ZrO2 Films by Atomic Layer Deposition Technique on Germanium Substrates
Authors
Keywords
Thin Films, ZrO<sub>2</sub>, X-ray difraction, Ellipsometry, Electrical properties
Journal
Silicon
Volume 8, Issue 3, Pages 345-350
Publisher
Springer Nature
Online
2015-08-18
DOI
10.1007/s12633-015-9322-7

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