Experimental evidence for the flatband voltage shift of high-k metal-oxide-semiconductor devices due to the dipole formation at the high-k∕SiO2 interface

Title
Experimental evidence for the flatband voltage shift of high-k metal-oxide-semiconductor devices due to the dipole formation at the high-k∕SiO2 interface
Authors
Keywords
-
Journal
APPLIED PHYSICS LETTERS
Volume 92, Issue 13, Pages 132907
Publisher
AIP Publishing
Online
2008-04-03
DOI
10.1063/1.2904650

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