High Dielectric Constant ZrO2 Films by Atomic Layer Deposition Technique on Germanium Substrates

标题
High Dielectric Constant ZrO2 Films by Atomic Layer Deposition Technique on Germanium Substrates
作者
关键词
Thin Films, ZrO<sub>2</sub>, X-ray difraction, Ellipsometry, Electrical properties
出版物
Silicon
Volume 8, Issue 3, Pages 345-350
出版商
Springer Nature
发表日期
2015-08-18
DOI
10.1007/s12633-015-9322-7

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