Inedible cellulose-based biomass resist material amenable to water-based processing for use in electron beam lithography
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Title
Inedible cellulose-based biomass resist material amenable to water-based processing for use in electron beam lithography
Authors
Keywords
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Journal
AIP Advances
Volume 5, Issue 7, Pages 077141
Publisher
AIP Publishing
Online
2015-07-18
DOI
10.1063/1.4927210
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