A novel noria (water-wheel-like cyclic oligomer) derivative as a chemically amplified electron-beam resist material

Published 2008 View Full Article

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Title
A novel noria (water-wheel-like cyclic oligomer) derivative as a chemically amplified electron-beam resist material
Authors
Keywords
-
Journal
JOURNAL OF MATERIALS CHEMISTRY
Volume 18, Issue 30, Pages 3588
Publisher
Royal Society of Chemistry (RSC)
Online
2008-06-30
DOI
10.1039/b805394d

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