Ion energy distribution measurements in rf and pulsed dc plasma discharges

Title
Ion energy distribution measurements in rf and pulsed dc plasma discharges
Authors
Keywords
-
Journal
PLASMA SOURCES SCIENCE & TECHNOLOGY
Volume 21, Issue 2, Pages 024004
Publisher
IOP Publishing
Online
2012-04-05
DOI
10.1088/0963-0252/21/2/024004

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