Ion energy distributions in bipolar pulsed-dc discharges of methane measured at the biased cathode

Calibration of a miniaturized retarding field analyzer for low-temperature plasmas: geometrical transparency and collisional effects

(2010) Tim Baloniak et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Mid-frequency deposition of a-C:H films using five different precursors

(2010) S. Peter et al.   VACUUM

Reconstruction of ion energy distribution function in a capacitive rf discharge

(2009) W. C. Chen et al.   APPLIED PHYSICS LETTERS

Plasma parameters of pulsed-dc discharges in methane used to deposit diamondlike carbon films

(2009) C. Corbella et al.   JOURNAL OF APPLIED PHYSICS

Physics and phenomena in pulsed magnetrons: an overview

(2009) J W Bradley et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Energy distribution of bombarding ions in plasma etching of dielectrics

(2009) F L Buzzi et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

Ion energy distributions at a capacitively and directly coupled electrode immersed in a plasma generated by a remote source

(2009) C Hayden et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

Ion energy distributions for the identification of active species and processes in low pressure hollow cathode discharges

(2009) I Tanarro et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

Retarding field analyzer for ion energy distribution measurements at a radio-frequency biased electrode

(2008) D. Gahan et al.   REVIEW OF SCIENTIFIC INSTRUMENTS

Up-scaling the production of modified a-C:H coatings in the framework of plasma polymerization processes

(2008) C. Corbella et al.   SOLID STATE SCIENCES