Retarding field analyzer for ion energy distribution measurements at a radio-frequency biased electrode

Published 2008 View Full Article

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Title
Retarding field analyzer for ion energy distribution measurements at a radio-frequency biased electrode
Authors
Keywords
-
Journal
REVIEW OF SCIENTIFIC INSTRUMENTS
Volume 79, Issue 3, Pages 033502
Publisher
AIP Publishing
Online
2008-03-11
DOI
10.1063/1.2890100

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