Article
Computer Science, Interdisciplinary Applications
Van-Hai Nguyen, Tien-Thinh Le, Hoanh-Son Truong, Huan Thanh Duong, Minh Vuong Le
Summary: This study proposes a rapid and robust machine-learning model for predicting the volumetric error of a five-axis machine tool. Several machine learning models are compared to find the best model for the problem at hand. The results show that the models proposed in this paper are more effective than those in the literature. The SVR Regression model has proven to be the best, with an RMSE of 0.03246 mm.
INTERNATIONAL JOURNAL OF COMPUTER INTEGRATED MANUFACTURING
(2023)
Article
Engineering, Multidisciplinary
Tang XinYu, Xu Kun, Bi QingZhen, Song ZhiYong, Ji YuLei, Qian DeHou
Summary: This paper proposes a tracking interferometer based on a bi-rotary milling head for volumetric accuracy measurement of a five-axis machine tool. By improving the multilateration principle, the geometric errors of rotary axis and laser beam are identified and minimized for reducing measurement uncertainty. Experimental results verify the performance of the proposed scheme.
SCIENCE CHINA-TECHNOLOGICAL SCIENCES
(2022)
Article
Engineering, Multidisciplinary
Soichi Ibaraki, Mashu Hiruya
Summary: A novel scheme is proposed in this paper to measure the two-dimensional error motions of two linear axes using only a laser interferometer. This scheme offers practical advantages with lower implementation cost and simplicity. An experimental case study on a large-sized machine tool is presented along with uncertainty analysis.
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY
(2021)
Article
Engineering, Manufacturing
Sareh M. Esmaeili, J. R. R. Mayer, Mark P. Sanders, J. Philipp Dahlem, Kanglin Xing
Summary: The paper discusses the generation of LUTs entries for a five-axis CNC machine using polynomial functions and predicts necessary volumetric errors within the working volume. The proposed scheme is tested on a small Mitsubishi M730 CNC machine, showing a significant reduction in errors through table-based compensation. Despite being effective in correcting some geometric errors, the generated LUTs are unable to compensate for certain axis misalignments.
JOURNAL OF MANUFACTURING SCIENCE AND ENGINEERING-TRANSACTIONS OF THE ASME
(2021)
Article
Engineering, Industrial
F. Egana, J. A. Yague-Fabra, U. Mutilba, S. Vez
Summary: Thermal effects pose a significant challenge for accurate large machine tools due to thermal drift in the structural loop. This study introduces a new methodology for uncertainty assessment in the Machine Tool Integrated Inverse Multilateration approach, highlighting ambient temperature variations as a major uncertainty contributor. An a priori Monte-Carlo simulation helps develop a measurement strategy to minimize the impact of thermal issues.
CIRP ANNALS-MANUFACTURING TECHNOLOGY
(2021)
Article
Automation & Control Systems
Xiaojian Liu, Jiarun Xu, Yang Wang, Lemiao Qiu, Shuyou Zhang, Jianrong Tan, Zhaolei He
Summary: This paper proposes a method based on a real-time continuous moving support deformation error model, which decouples complex error sources of machine tools by establishing a systematic spatial-variably volumetric error model. By converting the real-time deformation of moving support into joint surface deformation of the moving system through finite element simulation, the positional geometry of four sliders is used to analyze the translational and rotational position-dependent geometric errors (PDGE). Furthermore, a spatial-variably volumetric error model is constructed by fusing multi-axis 6-DOF PDGE based on homogeneous transformation theory. The optimal machining space for the machine tool is efficiently identified using a machining optimization method, which considers the machining features of the workpiece and the volumetric error model. The proposed method is applied to a horizontal machining center in a case study, providing detailed characterization of the spatial-variably error and identifying the optimal machining space for different sample workpieces, effectively improving the machining accuracy of the machine tool.
INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY
(2023)
Article
Engineering, Multidisciplinary
Benat Inigo, Ander Ibabe, Luis Norberto Lopez de Lacalle, Gorka Aguirre
Summary: This study proposes an artefact-based fast and automated solution for mapping volumetric errors in medium size 3-axis machine tools. It enables the calibration of a 1m3 workspace in less than 1 hour without prior knowledge of temperature variations. By performing continuous measurements for seven days and identifying a volumetric error variation model, this study estimates uncertainties of individual parameters and motion errors using residual errors and propagates them to the TCP through Monte Carlo simulations. The model is used to understand the changes in volumetric positioning error over time and its generation within the kinematic chain of the machine.
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY
(2023)
Article
Engineering, Industrial
K. Mori, D. Kono, A. Matsubara
Summary: This study proposes a vision-based method for volumetric displacement measurement using 3D reconstruction. By combining the extended intensity-fitting method with a self-illuminating target, accurate position detection can be achieved, which is crucial for improving the modeling accuracy of thermal deformations.
CIRP ANNALS-MANUFACTURING TECHNOLOGY
(2023)
Article
Chemistry, Multidisciplinary
Yindi Cai, Yang Liu, Chang Li, Zhixiang Wen
Summary: A miniature laser diode interferometer (MLDI) designed as an online measurement sensor, utilizes an algorithm to eliminate nonlinear errors, and conducts an error sensitivity analysis to understand the measurement accuracy of the MLDI. It proposes a new active wavelength stabilizer method to improve LD wavelength stability.
APPLIED SCIENCES-BASEL
(2022)
Article
Engineering, Electrical & Electronic
Michal Holub, Jitka Zatocilova, Tomas Marek, Petr Blecha, Petr Heinrich
Summary: This article discusses multilateration with a focus on numerical aspects for a given dataset. Volumetric errors of the MCV 754 milling machine are calculated using data measured by a LaserTRACER, and criteria are provided to determine the appropriate numerical method for solving the multilateration problem based on the measurement dataset. Two cost functions of the optimization problem and the extremal principle method are considered. Calculation accuracy is discussed in relation to the condition number of the matrix. The results are compared to those produced by the Trac-Cal software, a widely used standard for error compensations.
Article
Automation & Control Systems
Zixin Lin, Wenjie Tian, Dawei Zhang, Weiguo Gao, Lina Wang
Summary: This paper proposes a method for geometric error identification and compensation of CNC machine tools based on volumetric diagonal error measurements. A geometric error model for CNC machine tools was established and the error measurement principle of the laser tracker was used. The identified geometric errors could be substituted for error compensation, which was found to be effective in reducing volumetric diagonal errors according to the experiment results.
INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY
(2023)
Article
Engineering, Multidisciplinary
Zexin Zhuang, Kun Xu, Shaokun Zhang, Qingzhen Bi, Yulei Ji, Zhiyong Song
Summary: This paper proposes a novel inverse multilateration method that improves measurement accuracy by conducting sensitivity analysis and calibration of position-independent geometric errors in rotary axes. The paper investigates the error propagation mechanism and identifies the main error sources through sensitivity analysis, and optimizes the number and distribution of measured points based on the analysis results. Monte Carlo simulations and experiments on a bi-rotary head five-axis machine tool confirm that the proposed method significantly enhances the accuracy and efficiency of inverse multilateration measurement.
Article
Automation & Control Systems
Guohua Chen, Lin Zhang, Xiangjie Wang, Chao Wang, Hua Xiang, Guangqing Tong, Dianzhang Zhao
Summary: In this study, a new machine tool volumetric error model containing Abbe error is proposed based on the traditional machine tool volumetric error models, by analyzing the mechanism of Abbe error formation. A qualitative and quantitative simulation method is presented for the evaluation of machine tool space precision. The validity and feasibility of the model are verified through an example.
INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY
(2022)
Article
Engineering, Mechanical
Ang Tian, Shun Liu, Kun Chen, Wei Mo, Sun Jin
Summary: Assembly geometric error, a part of machine tool system errors, significantly affects the machining accuracy of multi-axis machine tools. Its non-uniform distribution in the working space cannot be eliminated due to error propagation during the assembly process. To overcome the limited expression ranges of existing models, a modeling methodology based on the Jacobian-Torsor model is proposed to describe the spatially distributed geometric errors. Simulation and experimental verification on five four-axis machine tools demonstrate the effectiveness of the proposed model in dealing with the spatial expression of assembly geometric errors.
CHINESE JOURNAL OF MECHANICAL ENGINEERING
(2023)
Article
Optics
Haijin Fu, Xiong Xinkang, Zheng Wang, Pengcheng Hu, Ke Wang, Jiubin Tan
Summary: This paper proposes a novel single-mode homodyne laser vibrometer with nanoscale-amplitude detectability using a liquid crystal variable retarder (LCVR). The LCVR introduces an extra variation of optical path difference to acquire a full ellipse, allowing for pre-extraction of nonlinearity correction parameters. Experimental results demonstrate that the nonlinear error can be effectively suppressed with the correction process based on the pre-extracted parameters, achieving a minimum detectable amplitude of less than 1 nm. Additionally, vibration measurement of targets with reflectivity as low as 0.048% is achieved with an automatic-gain-control module.
Article
Engineering, Multidisciplinary
Soichi Ibaraki, Hiroki Inui, Cefu Hong, Shizuo Nishikawa, Masahiro Shimoike
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY
(2019)
Article
Automation & Control Systems
Nico Zimmermann, Soichi Ibaraki
INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY
(2020)
Article
Engineering, Multidisciplinary
Soichi Ibaraki, Mashu Hiruya
Summary: A novel scheme is proposed in this paper to measure the two-dimensional error motions of two linear axes using only a laser interferometer. This scheme offers practical advantages with lower implementation cost and simplicity. An experimental case study on a large-sized machine tool is presented along with uncertainty analysis.
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY
(2021)
Article
Engineering, Manufacturing
Soichi Ibaraki, Rin Okumura
Summary: By using kinematic modeling, this paper investigates the thermal influence on the position and orientation errors of rotary axis average lines in five-axis machine tools. A new machining test method is proposed and an experimental case study demonstrates the observable changes in these errors due to thermal effects in finished test piece geometry.
INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE
(2021)
Article
Engineering, Manufacturing
Nuodi Huang, Yang Zhang, Limin Zhu, Soichi Ibaraki
Summary: This study proposes a machining test method to visually evaluate the thermal influence on machine tools without the need for measuring instruments. Experimental results demonstrate that the selected machine tool requires 150 minutes of sufficient warm-up time within the specified permissible deviation range.
JOURNAL OF MANUFACTURING SCIENCE AND ENGINEERING-TRANSACTIONS OF THE ASME
(2022)
Article
Engineering, Manufacturing
Qingzhao Li, Soichi Ibaraki, Wei Wang
Summary: This paper proposes a new machining test to evaluate the influence of rotation direction reversal on surface geometry and roughness quantitatively. The study finds that smoothing in the machine coordinate system can cause contour errors, while smoothing in the workpiece coordinate system can completely eliminate these errors.
JOURNAL OF MANUFACTURING SCIENCE AND ENGINEERING-TRANSACTIONS OF THE ASME
(2022)
Article
Automation & Control Systems
Nan Zhao, Soichi Ibaraki
Summary: This paper proposes a kinematic model and calibration scheme to improve the absolute positioning accuracy of industrial robots. The model includes not only link length errors and angular offsets, but also the error map of angular positioning deviation and the influence of backlash. Experimental results show that the model is effective and the compensation reduces the average absolute position error by 33%.
INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY
(2022)
Article
Engineering, Multidisciplinary
Shota Onishi, Soichi Ibaraki, Tomoyasu Kato, Masashi Yamaguchi, Takao Sugimoto
Summary: This paper proposes a novel scheme to separately identify the geometric errors of linear and rotary axes by using a touch-trigger probe and an uncalibrated test piece. Two case studies are presented, showing the long-term change in geometric errors and the influence of room temperature change on error motions.
Article
Engineering, Multidisciplinary
Soichi Ibaraki, Ryota Usui
Summary: This study introduces a new kinematic model for industrial robots, which accurately measures the angular positioning deviation of each rotary axis and proposes a new measurement method using open-loop tracking interferometer. Experimental results show that the accuracy of this model surpasses the conventional D-H model.
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY
(2022)
Article
Automation & Control Systems
Md Moktadir Alam, Soichi Ibaraki, Koki Fukuda, Sho Morita, Hiroshi Usuki, Naohiro Otsuki, Hirotaka Yoshioka
Summary: This article proposes a new kinematic model and identification scheme to improve the absolute positioning accuracy of industrial robots. The model considers the angular positioning deviations of the rotary axes and the influence of backlash, and it is identified using a laser tracker. Experimental results validate the prediction accuracy of the proposed model.
IEEE-ASME TRANSACTIONS ON MECHATRONICS
(2022)
Article
Engineering, Industrial
S. Ibaraki, R. Saito
Summary: This study proposes a novel kinematic model for an articulated arm coordinate measuring machine (AACMM) that includes angular position measurement errors of rotary axes. To evaluate the model, a new Single Point Articulation Test (SPAT) setup is presented, and the R-Test is used to measure the stylus sphere's three-dimensional displacement. The experimental results evaluate the prediction accuracy of the proposed model.
CIRP ANNALS-MANUFACTURING TECHNOLOGY
(2023)
Review
Engineering, Manufacturing
Wei Gao, Soichi Ibaraki, M. Alkan Donmez, Daisuke Kono, J. R. R. Mayer, Yuan -Liu Chen, Karoly Szipka, Andreas Archenti, Jean-Marc Linares, Norikazu Suzuki
Summary: This article presents advanced technologies for the calibration of machine tools. It categorizes kinematic errors into intra-axis errors, inter-axis errors, and volumetric errors. It addresses the measurement methods, modeling theories, and compensation strategies for machine tool errors as the major technological elements of machine tool calibration. The criteria for selecting a combination of technological elements for machine tool calibration are provided based on accuracy, complexity, and cost. Recent applications of artificial intelligence and machine learning in machine tool calibration are introduced and future trends in machine tool calibration are discussed.
INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE
(2023)
Article
Engineering, Multidisciplinary
Zhiyang Zhao, Nuodi Huang, Lei Zhong, Zhengchun Du, Soichi Ibaraki, Limin Zhu
Summary: This paper proposes an on-machine measurement method to evaluate the thermal influence on long-span crossbeam of gantry machine tools. A kinematic model is established to compute the deformation of the crossbeam, and algorithms for position calibration and point cloud registration are proposed. Through a continuous warm-up experiment, the thermal errors of the Y-axes are calculated, and the effectiveness of the proposed method is verified.
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY
(2023)
Article
Engineering, Industrial
S. Ibaraki, K. Fukuda, M. M. Alam, S. Morita, H. Usuki, N. Otsuki, H. Yoshioka
Summary: This study proposed a novel kinematic model for volumetric error compensation of six-axis robots, taking into account the angular positioning deviation of each rotary axis. Experimental results showed a significant reduction in static volumetric error across the entire workspace.
CIRP ANNALS-MANUFACTURING TECHNOLOGY
(2021)
Article
Engineering, Multidisciplinary
Soichi Ibaraki, Mashu Hiruya
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY
(2020)
Article
Engineering, Multidisciplinary
Junichi Kouguchi, Hayato Yoshioka
Summary: A new monitoring method for milling process using signal analysis of acceleration sensors is proposed in this research, which can solve the difficulty in estimating cutting forces for small diameter tools.
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY
(2024)
Article
Engineering, Multidisciplinary
Weijie Wang, Yanling Tian, Zhao Zhang, Zhilai Lu, Fujun Wang, Dawei Zhang
Summary: This paper proposes a comprehensive model for predicting the cutting depth and contact area in nanoscratching. The model takes into account the geometric shape of the indenter and elastic recovery, reducing prediction errors. The study also analyzes the influence of the indenter geometry on the contact area, with the face angle of the pyramid identified as a key factor.
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY
(2024)
Article
Engineering, Multidisciplinary
Qiaolin Li, Yuki Shimizu, Xiaohao Wang, Xinghui Li, Wei Gao
Summary: This paper introduces a stitching linear scan method for roundness and diameter measurement of small cylinders, using a ruby ball stylus as hardware filtering to eliminate the influence of high-frequency data. Experimental results show that the repeatability of the ruby ball stylus is better than the diamond stylus.
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY
(2024)
Article
Engineering, Multidisciplinary
Chaturaporn Kerdkaew, Surasak Kaewpho, Sakchai Chomkokard, Theera Yaemglin, Ittipon Cheowanish, Noparit Jinuntuya, Wiwat Wongkokua
Summary: A new calibration standard for a CMOS-based autocollimator using an optical angle generator with a submillimeter strip reflector (OAG-SSR) is proposed. This method provides angular values along the measuring range of the autocollimator without any mechanical movement, enabling a faster calibration process, which is suitable for integration with production lines.
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY
(2024)
Article
Engineering, Multidisciplinary
Haohao Tao, Tongjie Li, Feng Chen, Jinwei Fan, Ri Pan
Summary: In this paper, a novel OTA method is proposed that considers the relationship between tolerance of machine tools' key parts and volumetric error. A volumetric error prediction model is established based on the bridge between geometric error and tolerance. Additionally, a Processing Simplicity Index (PSI) is introduced to replace manufacturing cost and a tolerance-PSI model is established. An OTA model is formulated to minimize volumetric error and maximize PSI. The feasibility and effectiveness of the method are validated through simulations and experiments.
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY
(2024)
Article
Engineering, Multidisciplinary
Xiumin Zhang, Jianhua Liu, Huanxiong Xia, Xiaohui Ao, Jiechen Zhou, Zhihao Fu
Summary: A comprehensive finite-element model was developed in this paper to study the evolution of surface figure in high-precision bonded mirrors. The cure kinetics and mechanical behaviors of the optical adhesive were experimentally examined and modeled, and the effects of environmental factors on the surface-figure accuracy and stability were further investigated.
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY
(2024)
Article
Engineering, Multidisciplinary
Peng Wang, Bin Chen, Jian Li, Jianwei Wang, Yingjie Zhang, Kai Feng
Summary: This paper proposes an aerostatic bearing with damper modules to suppress vibration on the bearing surface. The stiffness and damping characteristics can be adjusted by changing the thickness of the sheets, resulting in effective vibration suppression.
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY
(2024)
Article
Engineering, Multidisciplinary
Lei Yang, Xiaoguang Guo, Renke Kang, Xianglong Zhu, Yufan Jia, Hao Wang
Summary: This paper develops an analytical model that takes into account the pad surface morphology to predict the evolution of the workpiece surface shape. The model considers the cross-scale relationship between the formation of lapped surface shape and the scratching process of a single abrasive grain. The simulated and experimental results validate the correctness and validity of the model, providing new ideas for controlling the workpiece surface.
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY
(2024)
Article
Engineering, Multidisciplinary
Gabriele Piscopo, Alessandro Salmi, Eleonora Atzeni
Summary: This paper proposes an artifact for the LP-DED process and evaluates its dimensional accuracy and geometrical tolerances. The findings show that the tolerances of the LP-DED process are comparable to sand casting, lower than LB-PBF technologies, but similar to EB-PBF technologies.
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY
(2024)
Article
Engineering, Multidisciplinary
Liang Xue, Ningsong Qu
Summary: This study focuses on the key issues of improving material removal rate and surface quality in macro-electrolyte jet machining. By introducing a novel tool with the rear-end tilted, the current density of the workpiece surface can be increased, leading to improved machining performance. Experimental results show that the tool with a rear-end tilt angle of 15 degrees significantly enhances the material removal rate and reduces surface roughness compared to the standard tool.
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY
(2024)
Article
Engineering, Multidisciplinary
Ping Yang, Kaixin Luo, Runxi Wu
Summary: This article proposes a new calibration device to measure the spatial errors of a six-axis serial robot. The device compensates for errors by modifying angles and identifying stiffness parameters, and experiments verify its effectiveness.
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY
(2024)
Article
Engineering, Multidisciplinary
Shilei Wu, Mingxiang Ling, Yingbin Wang, Tao Huang
Summary: This paper studies the electromechanical behavior of elliptical APAs by analyzing the multi-domain dynamics of piezoelectric stacks and compliant mechanisms using a novel electro-mechanical transfer matrix method. An analytical electro-elasto transfer matrix of piezoelectric stacks operating at the d33 mode is derived in the form of Taylor's series. The dynamic response spectrum of displacement and impedance for elliptical APAs is accurately captured by this electro-mechanical model, and different topologies of elliptical APAs are compared to suggest the optimal configuration.
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY
(2024)
Article
Engineering, Multidisciplinary
Lei Meng, Yusheng Liu, Ying Yan, Dongming Guo, Ping Zhou
Summary: This study explores electrochemically induced chemical etching (ECICE) as a method to achieve nanogram-level, low-cost, stress-free, and stable material removal of fused quartz. The key factors affecting removal minimum and stability are revealed through modeling analysis and testing. A proposed method achieves precision stable removal with satisfactory results at the nanogram level.
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY
(2024)
Article
Engineering, Multidisciplinary
Hong Yao, Hai Bi, Junjie Wei, Shuo Zhan, Fangxin Chen, IEEE
Summary: This paper presents a dual-loop control syringe-based picoliter-scale injection system for high-precision microinjection. The system utilizes an inner pneumatic servo loop and an outer position servo loop to achieve precise control. The experimental results demonstrate that the system can regulate the smallest droplet size to within 0.25 pL.
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY
(2024)
Article
Engineering, Multidisciplinary
Jinchun Yuan, Jiasheng Li, Ye Ding
Summary: In this paper, a simple and effective internal model control (IMC) system is proposed to attenuate thrust ripples in ultraprecision air-bearing linear feed systems, based on a modified modeling and identification method of permanent magnet linear synchronous motors (PMLSMs). The performance of the proposed method in overcoming nonlinearity and achieving smooth velocities in steady states is demonstrated through analysis and experiments.
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY
(2024)
