A bulk plasma model for dc and HiPIMS magnetrons

Title
A bulk plasma model for dc and HiPIMS magnetrons
Authors
Keywords
-
Journal
PLASMA SOURCES SCIENCE & TECHNOLOGY
Volume 17, Issue 4, Pages 045009
Publisher
IOP Publishing
Online
2008-08-27
DOI
10.1088/0963-0252/17/4/045009

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