Synthesis of α-Al2 O3 thin films using reactive high-power impulse magnetron sputtering

Published 2008 View Full Article

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Title
Synthesis of α-Al2 O3 thin films using reactive high-power impulse magnetron sputtering
Authors
Keywords
-
Journal
EPL
Volume 82, Issue 3, Pages 36002
Publisher
IOP Publishing
Online
2008-04-24
DOI
10.1209/0295-5075/82/36002

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