Top-down nanomanufacturing

Resistless nanofabrication by stencil lithography: A review

(2015) O. Vazquez-Mena et al.   MICROELECTRONIC ENGINEERING

Building a Fab on a Chip

(2014) Matthias Imboden et al.   Nanoscale

Large-area molecular patterning with polymer pen lithography

(2013) Daniel J Eichelsdoerfer et al.   Nature Protocols

Sub-10 nm Carbon Nanotube Transistor

(2012) Aaron D. Franklin et al.   NANO LETTERS

Simultaneous additive and subtractive three-dimensional nanofabrication using integrated two-photon polymerization and multiphoton ablation

(2012) Wei Xiong et al.   Light-Science & Applications

Advancements and challenges in development of atomic force microscopy for nanofabrication

(2011) Ampere A. Tseng   Nano Today

Lithography, metrology and nanomanufacturing

(2011) J. Alexander Liddle et al.   Nanoscale

Rapid turnaround scanning probe nanolithography

(2011) Philip C Paul et al.   NANOTECHNOLOGY

REBL: A novel approach to high speed maskless electron beam direct write lithography

(2009) Paul Petric et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

Resists for sub-20-nm electron beam lithography with a focus on HSQ: state of the art

(2009) A E Grigorescu et al.   NANOTECHNOLOGY