Building a Fab on a Chip

Atomic Calligraphy: The Direct Writing of Nanoscale Structures Using a Microelectromechanical System

(2013) Matthias Imboden et al.   NANO LETTERS

Carbon nanotube computer

(2013) Max M. Shulaker et al.   NATURE

Quantum engineering

(2013) Joaquin Fernández Rossier   NATURE MATERIALS

Microhotplate temperature sensor calibration and BIST

(2012) M. Afridi et al.   JOURNAL OF RESEARCH OF THE NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY

A single-atom transistor

(2012) Martin Fuechsle et al.   Nature Nanotechnology

Direct-write polymer nanolithography in ultra-high vacuum

(2012) Woo-Kyung Lee et al.   Beilstein Journal of Nanotechnology

Advancements and challenges in development of atomic force microscopy for nanofabrication

(2011) Ampere A. Tseng   Nano Today

100 mm dynamic stencils pattern sub-micrometre structures

(2011) Veronica Savu et al.   Nanoscale

Lithography, metrology and nanomanufacturing

(2011) J. Alexander Liddle et al.   Nanoscale

The Economic Limit to Moore's Law

(2010) Karl Rupp et al.   IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING

Suspended microchannel resonators with piezoresistive sensors

(2010) J. Lee et al.   LAB ON A CHIP

Tailoring the hydraulic impedance of out-of-plane micromachined electrospray sources with integrated electrodes

(2009) R. Krpoun et al.   APPLIED PHYSICS LETTERS

Resists for sub-20-nm electron beam lithography with a focus on HSQ: state of the art

(2009) A E Grigorescu et al.   NANOTECHNOLOGY

The fabrication, characterization and testing of a MEMS circular diaphragm mass sensor

(2008) A K Ismail et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

An atomic-resolution nanomechanical mass sensor

(2008) K. Jensen et al.   Nature Nanotechnology

Drop ejection utilizing sideways actuation of a MEMS piston

(2007) Paul Galambos et al.   SENSORS AND ACTUATORS A-PHYSICAL