Controlling Work Function and Damaging Effects of Sputtered RuO2 Gate Electrodes by Changing Oxygen Gas Ratio during Sputtering

Published 2013 View Full Article

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Title
Controlling Work Function and Damaging Effects of Sputtered RuO2 Gate Electrodes by Changing Oxygen Gas Ratio during Sputtering
Authors
Keywords
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Journal
ACS Applied Materials & Interfaces
Volume 5, Issue 4, Pages 1327-1332
Publisher
American Chemical Society (ACS)
Online
2013-02-06
DOI
10.1021/am302604e

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