Atomic layer deposition of functional films for Li-ion microbatteries
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Title
Atomic layer deposition of functional films for Li-ion microbatteries
Authors
Keywords
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Journal
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE
Volume 211, Issue 2, Pages 357-367
Publisher
Wiley
Online
2013-12-02
DOI
10.1002/pssa.201330130
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