GaAs surface passivation by plasma-enhanced atomic-layer-deposited aluminum nitride

Published 2010 View Full Article

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Title
GaAs surface passivation by plasma-enhanced atomic-layer-deposited aluminum nitride
Authors
Keywords
-
Journal
APPLIED SURFACE SCIENCE
Volume 256, Issue 24, Pages 7434-7437
Publisher
Elsevier BV
Online
2010-06-02
DOI
10.1016/j.apsusc.2010.05.085

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