Low-temperature plasma-enhanced atomic layer deposition of 2-D MoS2: large area, thickness control and tuneable morphology
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Title
Low-temperature plasma-enhanced atomic layer deposition of 2-D MoS2: large area, thickness control and tuneable morphology
Authors
Keywords
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Journal
Nanoscale
Volume 10, Issue 18, Pages 8615-8627
Publisher
Royal Society of Chemistry (RSC)
Online
2018-04-18
DOI
10.1039/c8nr02339e
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