Fabrication of complex 3-dimensional patterned structures on a ∼10 nm scale from a single master pattern by secondary sputtering lithography
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Title
Fabrication of complex 3-dimensional patterned structures on a ∼10 nm scale from a single master pattern by secondary sputtering lithography
Authors
Keywords
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Journal
Nanoscale
Volume 5, Issue 6, Pages 2358
Publisher
Royal Society of Chemistry (RSC)
Online
2013-01-17
DOI
10.1039/c3nr33739a
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