Shadow Overlap Ion-beam Lithography for Nanoarchitectures

Published 2009 View Full Article

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Title
Shadow Overlap Ion-beam Lithography for Nanoarchitectures
Authors
Keywords
-
Journal
NANO LETTERS
Volume 9, Issue 11, Pages 3726-3731
Publisher
American Chemical Society (ACS)
Online
2009-09-15
DOI
10.1021/nl901911p

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