Fabrication of complex 3-dimensional patterned structures on a ∼10 nm scale from a single master pattern by secondary sputtering lithography
出版年份 2013 全文链接
标题
Fabrication of complex 3-dimensional patterned structures on a ∼10 nm scale from a single master pattern by secondary sputtering lithography
作者
关键词
-
出版物
Nanoscale
Volume 5, Issue 6, Pages 2358
出版商
Royal Society of Chemistry (RSC)
发表日期
2013-01-17
DOI
10.1039/c3nr33739a
参考文献
相关参考文献
注意:仅列出部分参考文献,下载原文获取全部文献信息。- Large-Scale Nano Piezo Force Position Arrays as Ultrahigh-Resolution Micro- and Nanoparticle Tracker
- (2012) Kittitat Subannajui et al. ADVANCED FUNCTIONAL MATERIALS
- Conducting polymer nanowires fabricated by edge effect of NIL
- (2012) Gang Shi et al. JOURNAL OF MATERIALS CHEMISTRY
- Positionally Defined, Binary Semiconductor Nanoparticles Synthesized by Scanning Probe Block Copolymer Lithography
- (2012) Louise R. Giam et al. NANO LETTERS
- An advanced fabrication method of highly ordered ZnO nanowire arrays on silicon substrates by atomic layer deposition
- (2012) Kittitat Subannajui et al. NANOTECHNOLOGY
- Bifunctional ITO layer with a high resolution, surface nano-pattern for alignment and switching of LCs in device applications
- (2012) Hyeon Su Jeong et al. NPG Asia Materials
- Inorganic semiconductor nanomaterials for flexible and stretchable bio-integrated electronics
- (2012) Dae-Hyeong Kim et al. NPG Asia Materials
- Patterning of Flexible Transparent Thin-Film Transistors with Solution-Processed ZnO Using the Binary Solvent Mixture
- (2011) Kyongjun Kim et al. ADVANCED FUNCTIONAL MATERIALS
- A New Architecture for Transparent Electrodes: Relieving the Trade-Off Between Electrical Conductivity and Optical Transmittance
- (2011) Ping Kuang et al. ADVANCED MATERIALS
- Using colloid lithography to fabricate silicon nanopillar arrays on silicon substrates
- (2011) Jem-Kun Chen et al. JOURNAL OF COLLOID AND INTERFACE SCIENCE
- Patterned nano-sized gold dots within FET channel: from fabrication to alignment of single walled carbon nanotube networks
- (2011) Hwan-Jin Jeon et al. JOURNAL OF MATERIALS CHEMISTRY
- Single digit nanofabrication by step-and-repeat nanoimprint lithography
- (2011) C Peroz et al. NANOTECHNOLOGY
- Homeotropic alignment of liquid crystals on a nano-patterned polyimide surface using nanoimprint lithography
- (2011) Hong-Gyu Park et al. Soft Matter
- Metamaterials and metaoptics
- (2011) Ross C. McPhedran et al. NPG Asia Materials
- Fully lithography independent fabrication of nanogap electrodes for lateral phase-change random access memory application
- (2010) Jiayong Zhang et al. APPLIED PHYSICS LETTERS
- Fabrication of Complex Patterns with a Wide Range of Feature Sizes from a Single Line Prepattern by Successive Application of Capillary Force Lithography
- (2010) Su-Kyong Lee et al. LANGMUIR
- New Top-Down Approach for Fabricating High-Aspect-Ratio Complex Nanostructures with 10 nm Scale Features
- (2010) Hwan-Jin Jeon et al. NANO LETTERS
- Shadow Overlap Ion-beam Lithography for Nanoarchitectures
- (2009) Yeonho Choi et al. NANO LETTERS
- A nontransferring dry adhesive with hierarchical polymer nanohairs
- (2009) H. E. Jeong et al. PROCEEDINGS OF THE NATIONAL ACADEMY OF SCIENCES OF THE UNITED STATES OF AMERICA
- Nanoimprint Lithography Based Approach for the Fabrication of Large-Area, Uniformly-Oriented Plasmonic Arrays
- (2008) Brandon D. Lucas et al. ADVANCED MATERIALS
- Fabrication of Conjugated Polymer Nanowires by Edge Lithography
- (2008) Darren J. Lipomi et al. NANO LETTERS
- Large area nanorings fabricated using an atomic layer deposition Al2O3 spacer for magnetic random access memory application
- (2008) Yong Luo et al. NANOTECHNOLOGY
- Fabrication of ZnO Nanowires Using Nanoscale Spacer Lithography for Gas Sensors
- (2008) Hyun-Wook Ra et al. Small
Add your recorded webinar
Do you already have a recorded webinar? Grow your audience and get more views by easily listing your recording on Peeref.
Upload NowCreate your own webinar
Interested in hosting your own webinar? Check the schedule and propose your idea to the Peeref Content Team.
Create Now