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Title
Designing piezoelectric films for micro electromechanical systems
Authors
Keywords
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Journal
IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL
Volume 58, Issue 9, Pages 1782-1792
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2011-09-23
DOI
10.1109/tuffc.2011.2015
References
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