Very high frequency channel-select MEMS filters based on self-coupled piezoelectric AlN contour-mode resonators

Published 2010 View Full Article

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Title
Very high frequency channel-select MEMS filters based on self-coupled piezoelectric AlN contour-mode resonators
Authors
Keywords
-
Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 160, Issue 1-2, Pages 132-140
Publisher
Elsevier BV
Online
2010-04-29
DOI
10.1016/j.sna.2010.04.011

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