标题
Recent progress in low temperature nanoimprint lithography
作者
关键词
PMMA, PMAA, Nanoimprint Lithography, Squeeze Flow, Double Patterning
出版物
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
Volume 21, Issue 1, Pages 1-7
出版商
Springer Nature
发表日期
2014-11-22
DOI
10.1007/s00542-014-2366-6
参考文献
相关参考文献
注意:仅列出部分参考文献,下载原文获取全部文献信息。- Low-temperature thermal nanoimprint lithography of anti-reflective structures for flexible low band gap organic solar cells
- (2013) J Kettle et al. JOURNAL OF PHYSICS D-APPLIED PHYSICS
- Increased efficiency of direct nanoimprinting on planar and curved bulk titanium through surface modification
- (2013) Andrew I.M. Greer et al. MICROELECTRONIC ENGINEERING
- Double patterning in nanoimprint lithography
- (2013) Makoto Okada et al. MICROELECTRONIC ENGINEERING
- Fabrication of antireflection structure with antifouling-effect surface by ultraviolet nanoimprint lithography
- (2013) Keita Yajima et al. MICROELECTRONIC ENGINEERING
- Reduction of pattern peeling in step-and-flash imprint lithography
- (2013) Satoshi Takei et al. MICROELECTRONIC ENGINEERING
- Enhanced performance for solar cells with moth-eye structure fabricated by UV nanoimprint lithography
- (2012) Fang Jiao et al. MICROELECTRONIC ENGINEERING
- Surface adhesion and demolding force dependence on resist composition in ultraviolet nanoimprint lithography
- (2011) Alborz Amirsadeghi et al. APPLIED SURFACE SCIENCE
- Direct patterning on side chain crystalline polymer by thermal nanoimprinting using mold without antisticking layer
- (2011) Makoto Okada et al. MICROELECTRONIC ENGINEERING
- Fabrication of a nano-scale embedded metal electrode in flexible films by UV/thermal nanoimprint lithography tools
- (2011) S.Y. Park et al. MICROELECTRONIC ENGINEERING
- High density phase change data on flexible substrates by thermal curing type nanoimprint lithography
- (2011) Sung-Hoon Hong et al. MICROELECTRONIC ENGINEERING
- Enhancement of light polarization from electrospun polymer fibers by room temperature nanoimprint lithography
- (2010) Stefano Pagliara et al. NANOTECHNOLOGY
- Fabrication of planar organic nanotransistors using low temperature thermal nanoimprint lithography for chemical sensor applications
- (2010) J Kettle et al. NANOTECHNOLOGY
- Fabrication of a flexible multi-referenced surface plasmon sensor using room temperature nanoimprint lithography
- (2009) John P. Hulme et al. CURRENT APPLIED PHYSICS
- Cross-sectional observation of nanoimprint resins filled in SiO2/Si mold pattern using scanning electron microscopy
- (2009) Makoto Okada et al. MICROELECTRONIC ENGINEERING
- Replication of cancer cells using soft lithography bioimprint technique
- (2009) Fahmi Samsuri et al. MICROELECTRONIC ENGINEERING
- High-performing submicron organic thin-film transistors fabricated by residue-free embossing
- (2009) Christoph Auner et al. ORGANIC ELECTRONICS
- Room Temperature Nanoimprint Lithography Using Molds Fabricated by Molecular Beam Epitaxy
- (2008) S. Harrer et al. IEEE TRANSACTIONS ON NANOTECHNOLOGY
- Ultrasonic Nanoimprint on Poly(ethylene terephthalate) at Room Temperature
- (2008) Harutaka Mekaru et al. JAPANESE JOURNAL OF APPLIED PHYSICS
- Finite element analysis of low temperature thermal nanoimprint lithography using a viscoelastic model
- (2008) Nam Woong Kim et al. MICROELECTRONIC ENGINEERING
- A photo-polymerization resist for UV nanoimprint lithography
- (2008) Chun-Chang Wu et al. MICROELECTRONIC ENGINEERING
- mr-NIL 6000LT – Epoxy-based curing resist for combined thermal and UV nanoimprint lithography below 50°C
- (2008) Christine Schuster et al. MICROELECTRONIC ENGINEERING
Become a Peeref-certified reviewer
The Peeref Institute provides free reviewer training that teaches the core competencies of the academic peer review process.
Get StartedAsk a Question. Answer a Question.
Quickly pose questions to the entire community. Debate answers and get clarity on the most important issues facing researchers.
Get Started