High density phase change data on flexible substrates by thermal curing type nanoimprint lithography

Title
High density phase change data on flexible substrates by thermal curing type nanoimprint lithography
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 88, Issue 8, Pages 2013-2016
Publisher
Elsevier BV
Online
2011-02-04
DOI
10.1016/j.mee.2011.01.057

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