Wide bandgap semiconductor thin films for piezoelectric and piezoresistive MEMS sensors applied at high temperatures: an overview
出版年份 2013 全文链接
标题
Wide bandgap semiconductor thin films for piezoelectric and piezoresistive MEMS sensors applied at high temperatures: an overview
作者
关键词
Piezoelectric Material, Surface Acoustic Wave, Piezoelectric Property, Piezoelectric Response, Wide Bandgap Semiconductor Material
出版物
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
Volume 20, Issue 1, Pages 9-21
出版商
Springer Nature
发表日期
2013-12-13
DOI
10.1007/s00542-013-2029-z
参考文献
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- (2012) Kasra Momeni et al. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING
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- (2012) Peihong Wang et al. APPLIED SURFACE SCIENCE
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- (2012) M. Petersen et al. DIAMOND AND RELATED MATERIALS
- An AlN MEMS Piezoelectric Microphone for Aeroacoustic Applications
- (2012) Matthew D. Williams et al. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
- Preparation of highly c-axis oriented AlN films on Si substrate with ZnO buffer layer by the DC magnetron sputtering
- (2012) Xiangqin Meng et al. MATERIALS LETTERS
- Studies on SiC, DLC and TiO2 thin films as piezoresistive sensor materials for high temperature application
- (2012) M. A. Fraga et al. MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
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- (2012) Sigitas Tamulevičius et al. THIN SOLID FILMS
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- (2012) Mou Pal et al. Nanoscale Research Letters
- Characteristics of SAW UV sensors based on a ZnO/Si structure using third harmonic mode
- (2011) Duy-Thach Phan et al. CURRENT APPLIED PHYSICS
- Preliminary evaluation of the influence of the temperature on the performance of a piezoresistive pressure sensor based on a-SiC film
- (2011) M. A. Fraga et al. MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
- Fabrication and Characterization of a Polycrystalline 3C-SiC Piezoresistive Micro-pressure Sensor
- (2010) Gwiy-Sang Chung JOURNAL OF THE KOREAN PHYSICAL SOCIETY
- Highly piezoelectric AlN thin films grown on amorphous, insulating substrates
- (2010) Alvaro Artieda et al. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
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- (2010) M. A. Fraga et al. MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
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- Aluminum nitride on titanium for CMOS compatible piezoelectric transducers
- (2009) Joseph C Doll et al. JOURNAL OF MICROMECHANICS AND MICROENGINEERING
- Surface acoustic wave characteristics of AlN thin films grown on a polycrystalline 3C-SiC buffer layer
- (2009) Si-Hong Hoang et al. MICROELECTRONIC ENGINEERING
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- (2009) Alimujiang Fulati et al. SENSORS
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- (2009) Ralf Koppert et al. SOLID STATE SCIENCES
- Electrical and piezoresistive properties of ion beam deposited DLC films
- (2008) Š. Meškinis et al. APPLIED SURFACE SCIENCE
- Recent Progress in Materials Issues for Piezoelectric MEMS
- (2008) Paul Muralt JOURNAL OF THE AMERICAN CERAMIC SOCIETY
- A DLC/W-DLC multilayered structure for strain sensing applications
- (2007) Takanori Takeno et al. DIAMOND AND RELATED MATERIALS
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