Closed-form empirical relations to predict the static pull-in parameters of electrostatically actuated microcantilevers having linear width variation

Published 2010 View Full Article

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Title
Closed-form empirical relations to predict the static pull-in parameters of electrostatically actuated microcantilevers having linear width variation
Authors
Keywords
-
Journal
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
Volume 17, Issue 1, Pages 35-45
Publisher
Springer Nature
Online
2010-10-27
DOI
10.1007/s00542-010-1153-2
References
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