Deflection, Frequency, and Stress Characteristics of Rectangular, Triangular, and Step Profile Microcantilevers for Biosensors

Title
Deflection, Frequency, and Stress Characteristics of Rectangular, Triangular, and Step Profile Microcantilevers for Biosensors
Authors
Keywords
-
Journal
SENSORS
Volume 9, Issue 8, Pages 6046-6057
Publisher
MDPI AG
Online
2009-07-31
DOI
10.3390/s90806046

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