Experimental characterization of electrostatically actuated in-plane bending of microcantilevers

Published 2008 View Full Article

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Title
Experimental characterization of electrostatically actuated in-plane bending of microcantilevers
Authors
Keywords
-
Journal
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
Volume 14, Issue 7, Pages 909-918
Publisher
Springer Nature
Online
2008-02-29
DOI
10.1007/s00542-008-0597-0

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