Closed-form empirical relations to predict the static pull-in parameters of electrostatically actuated microcantilevers having linear width variation

出版年份 2010 全文链接

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作者

关键词

出版物

Volume 17, Issue 1, Pages 35-45

出版商

Springer Nature

发表日期

2010-10-27

DOI

10.1007/s00542-010-1153-2

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