Behavior of zirconium oxide films processed from novel monocyclopentadienyl precursors by atomic layer deposition

Published 2009 View Full Article

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Title
Behavior of zirconium oxide films processed from novel monocyclopentadienyl precursors by atomic layer deposition
Authors
Keywords
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Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
Volume 27, Issue 1, Pages 226
Publisher
American Vacuum Society
Online
2009-02-11
DOI
10.1116/1.3071844
References
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